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Journal Articles

Effect of mass-selected ion species on structure and properties of diamond-like carbon films

Tang, Z.; Zhang, Z.; Narumi, Kazumasa; Xu, Y.; Naramoto, Hiroshi; Nagai, Shiro; Miyashita, Kiyoshi*

Journal of Applied Physics, 89(3), p.1959 - 1964, 2001/02

 Times Cited Count:30 Percentile:72.75(Physics, Applied)

no abstracts in English

Journal Articles

Growth of carbon thin film by low-energy mass-selected ion beam deposition

*; J.A.van-den-Berg*; Nagai, Shiro; D.G.Armour*

Nuclear Instruments and Methods in Physics Research B, 148, p.673 - 677, 1999/00

 Times Cited Count:26 Percentile:84.89(Instruments & Instrumentation)

no abstracts in English

Journal Articles

A SIMS study on secondary ion formation during low-enrgy methyl ion beam deposition

*; Aoki, Yasushi; Nagai, Shiro

Nuclear Instruments and Methods in Physics Research B, 108, p.75 - 80, 1996/00

 Times Cited Count:2 Percentile:31.89(Instruments & Instrumentation)

no abstracts in English

JAEA Reports

Low-energy ion-beam deposition apparatus equipped with surface analysis system

*; Aoki, Yasushi; Nagai, Shiro

JAERI-Research 94-018, 45 Pages, 1994/10

JAERI-Research-94-018.pdf:1.2MB

no abstracts in English

Journal Articles

Thin film growth by low energy hydrocarbon ion deposition

*; Aoki, Yasushi; Nagai, Shiro

Dai-4-Kai Ryushisen No Sentanteki Oyo Gijutsu Ni Kansuru Shimpojiumu, p.175 - 178, 1993/00

no abstracts in English

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